Sub-wavelength Proximity Nanolithography using Plasmonic Lens

제목
Sub-wavelength Proximity Nanolithography using Plasmonic Lens
저자
Seo, Sungkyu
학회명
The 51th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabricati
개최국가
미국
학회 개최일
2007-05-29 ~ 2007-06-01