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A Study on the Fabrication of SOI Wafer Using Silicon Surface Activated by Hydrogen Plasma

  • Sung, Man Young
제목
A Study on the Fabrication of SOI Wafer Using Silicon Surface Activated by Hydrogen Plasma
저자
Sung, Man Young
학회명
KIEE Summer Annual Conference '99
개최지
KIEE Summer Annual Conference '99
학회 개최일
1999-07-19

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