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Other origin of deep defect states in oxide semiconductor thin film deposited by magnetron sputtering process; effect of negative oxygen ions accelerated by self-bias on amorphous InGaZnO thin film transistors
- 제목
- Other origin of deep defect states in oxide semiconductor thin film deposited by magnetron sputtering process; effect of negative oxygen ions accelerated by self-bias on amorphous InGaZnO thin film transistors
- 저자
- Hong MunPyo
- 발행일
- 2012-01-31
- 학회명
- ITC 2012 ？ 8th International Thin-Film Transistor Conference
- 개최지
- Lisbon, Portugal
- 개최국가
- 포르투갈
- 학회 개최일
- 2012-01-30 ~ 2012-01-31