상세 보기
Point Cloud Based Representations Learning for Wafer Pattern Recognition in Semiconductor Fabrication Process
Point Cloud Based Representations Learning for Wafer Pattern Recognition in Semiconductor Fabrication Process
- 제목
- Point Cloud Based Representations Learning for Wafer Pattern Recognition in Semiconductor Fabrication Process
- 제목 (타언어)
- Point Cloud Based Representations Learning for Wafer Pattern Recognition in Semiconductor Fabrication Process
- 저자
- Jun-Geol Baek
- 발행일
- 2022-07-20
- 학회명
- International Conference on Precision Engineering and Sustainable Manufacturing 2022 (PRESM 2022)
- 개최지
- Jeju, Korea
- 개최국가
- 대한민국
- 학회 개최일
- 2022-07-20 ~ 2022-07-22