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High quality silicon-nitride thin films grown by helium plasma-enhanced chemical vapor deposition
- 제목
- High quality silicon-nitride thin films grown by helium plasma-enhanced chemical vapor deposition
- 저자
- Ju, Byeongkwon
- 학회명
- Technical Digest of 9’th International Vacuum Microelectronics Conference
- 학회 개최일
- 2006-07-10 ~ 2006-07-10