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Fabrication of sub-50nm Au lines using thermal curing nanoimprint lithography

제목
Fabrication of sub-50nm Au lines using thermal curing nanoimprint lithography
저자
Lee, Heon
학회명
2006 NANO KOREA
개최지
Ilsan, Korea
학회 개최일
2006-08-30 ~ 2006-09-01

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