Di-block copolymer directed anodization of hexagonally ordered nanoporous aluminum oxide

  • Noh, Kunbae
  • Choi, Chulmin
  • Kim, Hyunsu
  • Oh, Young
  • Kim, Jin-Yeol
  • 외 3명
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초록

Porous anodized aluminum oxide (AAO) nanostructures have been extensively investigated as versatile templates for nanodots and nanowires for many applications. Such self-ordered AAO structures are often achieved by so-called two-step anodization. Ordered pore arrangements can be obtained in the second step after removing the AAO layer formed in the first anodizing step, during which hexagonally ordered, concave-pored Al surface is formed so as to serve as vertical pore nucleation sites for the subsequent anodization step. Although such a two-step anodization process has proven useful for bulk Al surface, the relatively large amount of Al material that needs to be used up to obtain a well ordered AAO template is an issue when the starting material is a thin film layer of Al rather than a bulk Al foil. In this paper, we demonstrate successful fabrications of ordered and vertically aligned AAO nanopore patterns directed by a hexagonally patterned poly(styrene-b-4-vinylpyridine) di-block copolymer layer placed on a thin Al film surface. In addition, a successful electrodeposition of Ni nanowires into the AAO nanopores is demonstrated and their magnetization properties are studied. (C) 2011 American Vacuum Society. [DOI: 10.1116/1.3659716]

키워드

ANODIC POROUS ALUMINASULFURIC-ACID-SOLUTIONMICELLE NANOLITHOGRAPHYHOLE INTERVALPORE ARRAYSLITHOGRAPHYFABRICATIONNANOSTRUCTURES
제목
Di-block copolymer directed anodization of hexagonally ordered nanoporous aluminum oxide
저자
Noh, KunbaeChoi, ChulminKim, HyunsuOh, YoungKim, Jin-YeolJung, Se-YeonSeong, Tae-YeonJin, Sungho
DOI
10.1116/1.3659716
발행일
2011-11
유형
Article
저널명
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
29
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