Low Temperature Tin Oxide Thin Film Deposition on Plastic Substrate by ECR-MOCVD with Ion Beam Assistance

제목
Low Temperature Tin Oxide Thin Film Deposition on Plastic Substrate by ECR-MOCVD with Ion Beam Assistance
저자
BYUN, Dong Jin
학회명
The 56th Annual Meeting of the International society of Electrochemistry
학회 개최일
2002-01-01 ~ 2002-01-02