Fabrication method of 3D feed horn shape MEMS antenna array using MRPBI system and application for microbolometer

  • Pak, James Jungho
제목
Fabrication method of 3D feed horn shape MEMS antenna array using MRPBI system and application for microbolometer
저자
Pak, James Jungho
학회명
SPIE's Device and Process Technologies for MEMS and Microelectronics II
개최지
Adelaide, Australia
개최국가
오스트레일리아
학회 개최일
2001-12-01 ~ 2001-12-01