ScholarWorks@고려대학교

상세 보기

Study of adaptive model predictive control algorithm for efficient control of semiconductor process

  • KIM SUNG SHICK
제목
Study of adaptive model predictive control algorithm for efficient control of semiconductor process
저자
KIM SUNG SHICK
학회명
AEC/APC Symposium ASIA 2009
개최국가
일본
학회 개최일
2009-11-10 ~ 2009-11-12

ScholarWorks@고려대학교

02841 서울특별시 성북구 안암로 145 Tel. 02-3290-2963

COPYRIGHT © 고려대학교 All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.