Characteristics of Deposition RF-Power by sputter of Silicon Anode Electrode for Thin Film Battery

Characteristics of Deposition RF-Power by sputter of Silicon Anode Electrode for Thin Film Battery
제목
Characteristics of Deposition RF-Power by sputter of Silicon Anode Electrode for Thin Film Battery
제목 (타언어)
Characteristics of Deposition RF-Power by sputter of Silicon Anode Electrode for Thin Film Battery
저자
BYUN, Dong Jin
발행일
2020-11-19
학회명
2020년도 한국재료학회 춘.추계학술대회
개최국가
대한민국
학회 개최일
2020-11-18 ~ 2020-11-20