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Fabrication of high-yield Si micro-diaphragms using electrochemical etch-stop in TMAH/IPA/pyrazine solution
- 제목
- Fabrication of high-yield Si micro-diaphragms using electrochemical etch-stop in TMAH/IPA/pyrazine solution
- 저자
- Ju, Byeongkwon
- 학회명
- International Symposium on Microelectronics and MEMS(SPIE)
- 학회 개최일
- 1999-10-27 ~ 1999-10-29