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Characterization of La2O3 Thin Films Deposited on Si(100) and TiN Substrates by ALD

  • Kim, Byong-Ho
제목
Characterization of La2O3 Thin Films Deposited on Si(100) and TiN Substrates by ALD
저자
Kim, Byong-Ho
학회명
한국세라믹학회
개최지
서울시립대학교
학회 개최일
2005-04-22 ~ 2005-04-23

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