Fabrication of 70nm-sized metal patterns on flexible PET Film using nanoimprint lithography

제목
Fabrication of 70nm-sized metal patterns on flexible PET Film using nanoimprint lithography
저자
Lee, Heon
학회명
2007 Nano Korea
개최지
IlSan, KINTEX
학회 개최일
2007-08-29 ~ 2007-08-31