The effects of annealing on electrical and crystalline properties of ZnO thin film by atomic layer deposition

The effects of annealing on electrical and crystalline properties of ZnO thin film by atomic layer deposition
제목
The effects of annealing on electrical and crystalline properties of ZnO thin film by atomic layer deposition
제목 (타언어)
The effects of annealing on electrical and crystalline properties of ZnO thin film by atomic layer deposition
저자
BYUN, Dong Jin
발행일
2016-05-19
학회명
2016년도 한국재료학회 춘계학술대회
개최국가
대한민국
학회 개최일
2016-05-18 ~ 2016-05-20