Device Characteristics of the SLS poly-Si Thin Film Transistors Fabricated on SOI Structure

  • Pak, James Jungho
제목
Device Characteristics of the SLS poly-Si Thin Film Transistors Fabricated on SOI Structure
저자
Pak, James Jungho
학회명
Proceedings of The 4th Joint Symposium on Electronic Materials (JSEM 2001)
개최지
Proceedings of The 4th Joint Symposium on Electronic Materials (JSEM 2001)
학회 개최일
2001-07-19