A Comparision between experimental results and the thermal simulation for the fabrication of micro hot plate

  • Yung-Kwon Sung
제목
A Comparision between experimental results and the thermal simulation for the fabrication of micro hot plate
저자
Yung-Kwon Sung
학회명
ICSE '96
개최지
ICSE '96
학회 개최일
1996-11-27