Microstructural of Study of Cubic Boron Nitride Thin Film Deposited by UBM Method with Hydrogen Addition

제목
Microstructural of Study of Cubic Boron Nitride Thin Film Deposited by UBM Method with Hydrogen Addition
저자
Huh, Joo Youl
발행일
2012-04-27
학회명
International Conference on Metallurgical Coatings and Thin Films2012
개최국가
미국
학회 개최일
2012-04-23 ~ 2012-04-27