Fabrication of 2D photonic crystal assisted Y2O3:Eu3+ thin-film phosphors by direct nano-imprinting

  • Ko, Ki-Young; 
  • Her, Eun-Jin; 
  • Nichols, William T.; 
  • Lee, Heon; 
  • Do, Young Rag; 
  • 외 1명
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초록

The effect of a two-dimensional Y2O3:Eu3+ photonic crystal (PC) pattern on the extraction efficiency of photoluminescence from the underlying Y2O3:Eu3+ thin-film phosphor was investigated. The photonic crystal structure was fabricated using a direct nano-imprint process with a Pechini-type Y2O3:Eu3+ sol as the nano-imprint resin and a patterned polydimethylsiloxane (PDMS) stamp as the mold. The elevated pressure and temperature of the nano-imprinting process converts the Y2O3:Eu3+ sol into a Y2O3:Eu3+ gel resulting in high definition transfer of the 2D patterns of the master template into the gel on top of the Y2O3:Eu3+ thin-film phosphor layer. The extraction efficiency of the 2D Y2O3:Eu3+ gel PC-assisted Y2O3:Eu3+ thin-film phosphor was approximately 3.7 times higher than a non-PC Y2O3:Eu3+ gel coated Y2O3:Eu3+ thin-film phosphor. (C) 2011 Elsevier B.V. All rights reserved.

키워드

Nano-imprint; PDMS stamp; Photonic crystal; Thin-film phosphor; Sol-gel; LUMINESCENCE; LITHOGRAPHY
제목
Fabrication of 2D photonic crystal assisted Y2O3:Eu3+ thin-film phosphors by direct nano-imprinting
저자
Ko, Ki-Young; Her, Eun-Jin; Nichols, William T.; Lee, Heon; Do, Young Rag; Ahn, Jinho
DOI
10.1016/j.mee.2011.03.162
발행일
2011-09
유형
Article
저널명
Microelectronic Engineering
권
88
호
9
페이지
2930 ~ 2933