Simulation and Fabrication of a KID Sensor for the CMB Polarization Measurement

초록

We designed prototype Kinetic Inductance Detectors (KID) to test sensors for a Cosmic Microwave Background (CMB) experiments. The design has been simulated extensively with a commercially available software for the optimization of the KID sensor. A coplanar waveguide type photo mask is designed and a KID sensor is fabricated with Nb thin film. The goal of this design and fabrication of the protype KID is to understand behaviors of basic design parameters and fundamental properties of the sensor. The basic resonator parameters are measured and their implications are discussed.

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