Enhancement of GaN crystallinity by using H2/N2 plasma exposure to sapphire substrate

제목
Enhancement of GaN crystallinity by using H2/N2 plasma exposure to sapphire substrate
저자
BYUN, Dong Jin
학회명
Astract of The 22nd Annual Conference of The Korean Vacuum Society
개최지
Astract of The 22nd Annual Conference of The Korean Vacuum Society
학회 개최일
2002-02-19