Fabrication Of 70nm-Sized Metal Patterns On Flexible PET Film Using Nanoimprint Lithography

제목
Fabrication Of 70nm-Sized Metal Patterns On Flexible PET Film Using Nanoimprint Lithography
저자
Lee, Heon
학회명
2007 EIPBN
개최지
Denver
학회 개최일
2007-05-29 ~ 2007-06-01