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The Passivation Qualities of Hydrogenated Amorphous Silicon Nitride via Plasma Cleaning for Solar Cells

  • Donghwan KIM
제목
The Passivation Qualities of Hydrogenated Amorphous Silicon Nitride via Plasma Cleaning for Solar Cells
저자
Donghwan KIM
학회명
The 1st International Conference on Microelectronic and Plasma technology
개최국가
대한민국
학회 개최일
2008-08-18 ~ 2008-08-20

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