Milli-Hertz Frequency Tuning Architecture Toward High Repeatable Micromachined Axi-Symmetry Gyroscopes

초록

Axi- symmetry micro gyroscopes are increasingly popular for their ultrahigh measurement sensitivity. However, a side effect is the bias repeatability problem. In this article, we propose and demonstrate an ultraprecise frequency tuning solution to achieve state-of-the-art repeatability performance. The gyroscope dynamics are first analyzed and the major error source is confirmed as the frequency split. Then, an advanced frequency tracker and a precision tuning architecture are developed to improve the bias repeatability. The experimental results prove that the frequency tracker can identify the frequency splits at the mHz level. Consequently, a state-of-the-art turn -ON to turn -ON bias repeatability of 3.6(?)/h is conducted that shows orders of magnitude better than conventional solutions.

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