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Thickness dependence of ZnO microstructure deposited on Si substrate by ALD
Thickness dependence of ZnO microstructure deposited on Si substrate by ALD
- 제목
- Thickness dependence of ZnO microstructure deposited on Si substrate by ALD
- 제목 (타언어)
- Thickness dependence of ZnO microstructure deposited on Si substrate by ALD
- 저자
- BYUN, Dong Jin
- 발행일
- 2015-10-27
- 학회명
- 14th International Union of Materials Research Societies-International Conference on Advanced Materials
- 개최국가
- 대한민국
- 학회 개최일
- 2015-10-25 ~ 2015-10-29