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Mechanical quality factor measurement of micro structure according to vacuum range and temperature variation
- 제목
- Mechanical quality factor measurement of micro structure according to vacuum range and temperature variation
- 저자
- Ju, Byeongkwon
- 학회명
- AVS 53rd International Symposium & Exhibition
- 개최국가
- 미국
- 학회 개최일
- 2006-11-12 ~ 2006-11-17