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Vacuum in-line packaging and characterization of the surface-micromachined vacuum magnetic field sensors
- 제목
- Vacuum in-line packaging and characterization of the surface-micromachined vacuum magnetic field sensors
- 저자
- Ju, Byeongkwon
- 학회명
- International Sensor Conference’2001
- 학회 개최일
- 2001-10-13 ~ 2001-10-13