Influence of thermal stress on heat-generating performance of indium tin oxide nanoparticle thin films

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초록

In this study, the authors investigate the influence of thermal stress on the heat-generating performance of indium tin oxide (ITO) nanoparticle (NP) thin films on quartz substrates. ITO NP thin films experience repeated thermal stresses during their electrical heating cycles. As the number of the heating cycles increases to 50, the highest temperature of the ITO NP thin film decreases from 317 to 221 degrees C. Our analysis of the temperature profiles, morphological images, and electrical resistance reveals that the degradation in the heat-generating performance is closely correlated with microcracks in the oxide thin film caused by thermal stresses. (C) 2016 American Vacuum Society.

키워드

TRANSPARENT HEATERS; POLYMER COMPOSITE; MICROCRACKING
제목
Influence of thermal stress on heat-generating performance of indium tin oxide nanoparticle thin films
저자
Yang, Kyungwhan; Cho, Kyoungah; Kim, Sangsig; Im, Kiju
DOI
10.1116/1.4963832
발행일
2016-11
유형
Article
저널명
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
권
34
호
6