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Modeling of Electron Temperature and DC Bias Voltage in an Inductively Coupled Cl2/Ar Plasma Using Neural Network
- 제목
- Modeling of Electron Temperature and DC Bias Voltage in an Inductively Coupled Cl2/Ar Plasma Using Neural Network
- 저자
- PARK KANG-BAK
- 발행일
- 2011-11-22
- 학회명
- TACT 2011 International Thin Films Conference
- 개최지
- Kenting, Taiwan
- 개최국가
- 대만
- 학회 개최일
- 2011-11-20 ~ 2011-11-23