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Thermal annealing effects of pre-treated sapphire(0001) substrate using various ion implantation for GaN epilayers
- 제목
- Thermal annealing effects of pre-treated sapphire(0001) substrate using various ion implantation for GaN epilayers
- 저자
- BYUN, Dong Jin
- 학회명
- Proceeding of the 2nd International Symposium on Nanomanufacturing
- 학회 개최일
- 2002-01-01 ~ 2002-01-02