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Fabrication of 100nm sized patterns on flexible Polyethylene-Terephthalate substrate using monomer based thermal curing nanoimprint lithography
- 제목
- Fabrication of 100nm sized patterns on flexible Polyethylene-Terephthalate substrate using monomer based thermal curing nanoimprint lithography
- 저자
- Lee, Heon
- 학회명
- 2005 Chaina NANO
- 개최지
- Beijing
- 학회 개최일
- 2005-06-09 ~ 2005-06-11