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Influence of the neutral beam energy on low temperature silicon oxide thin film grown by neutral beam assisted chemical vapor deposition
- 제목
- Influence of the neutral beam energy on low temperature silicon oxide thin film grown by neutral beam assisted chemical vapor deposition
- 저자
- Hong MunPyo
- 발행일
- 2012-07-04
- 학회명
- ICMAP 2012 (The 7th International Conference on Microelectronics and Plasma Technology)
- 개최국가
- 대한민국
- 학회 개최일
- 2012-07-04 ~ 2012-07-06