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The deposition of amorphous carbon thin films for hard mask applications by reactive particle beam assisted sputtering process
- 제목
- The deposition of amorphous carbon thin films for hard mask applications by reactive particle beam assisted sputtering process
- 저자
- Hong MunPyo
- 학회명
- 1st International Conference on Microelectronics and plasma Technology
- 개최지
- 서울
- 개최국가
- 대한민국
- 학회 개최일
- 2008-08-18 ~ 2008-08-20