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Etching Characteristics of GST thin films using Inductively Coupled Plasma of Cl2/Ar gas mixtures,

  • HONG, Suk In
제목
Etching Characteristics of GST thin films using Inductively Coupled Plasma of Cl2/Ar gas mixtures,
저자
HONG, Suk In
학회명
Proceeding of the KIEE Summer
학회 개최일
2005-06-21 ~ 2005-06-25

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