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Properties of Piezoelectric Actuator on Silicon Membrane Prepared by Screen Printing Method and MEMS Process

  • Sung, Man Young
제목
Properties of Piezoelectric Actuator on Silicon Membrane Prepared by Screen Printing Method and MEMS Process
저자
Sung, Man Young
학회명
107th Annual Meeting Exposition & Technology Fair
개최지
Maryland, U.S.A.
학회 개최일
2005-04-10 ~ 2005-04-13

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