Application of [001]-textured (K, Na)(Nb, Sb)O-3-CaZrO3 thick films to piezoelectric energy harvesters

초록

A (K, Na)NbO3 (KNN)-based lead-free piezoceramic for a piezoelectric energy harvester (PEH) should exhibit a large k(ij), Q(m), d(ij), and a small epsilon(T)(33) to generate a large power output. Texturing was used to enhance the piezoelectricity of KNN-related piezoceramics. In particular, the k(ij) and d(ij) values of the KNN-based piezoceramics were considerably improved after texturing along the [001] direction, with a small change in the epsilon(T)(33)/epsilon(0) value, indicating that the [001]-textured KNN-based thick films are good candidates for use in PEHs. The 0.97 (K0.5Na0.5)(Nb0.93Sb0.07)O-3-0.03CaZrO(3) [KN(N0.93S0.07)-CZ] thick film was textured along the [001] direction, and this thick film exhibited a large k(p) (0.57) and d(33) x g(33) (25.7 pm(2)/N), which is the largest d(33) x g(33) of the KNN-based piezoceramics reported to date. A cantilever PEH fabricated using the textured KN(N0.93S0.07)-CZ thick film exhibited a power density of 21.4 mu W/mm(3) at the resonance frequency. This is the highest power density observed for PEHs fabricated using lead-free piezoceramics. The PEH also exhibited a power density of 0.023 mu W/mm(3) at the off-resonance frequency. Therefore, the textured KN(N0.93S0.07)-CZ thick film is a good candidate for use in PEHs.

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