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Fabrication of High-Speed Polyimide-based Humidity Sensor Using Anisotropic and Isotropic Etching With ICP

  • Kwon, Kwang-Ho
제목
Fabrication of High-Speed Polyimide-based Humidity Sensor Using Anisotropic and Isotropic Etching With ICP
저자
Kwon, Kwang-Ho
학회명
1st International Conference on Microelectronics and plasma Technology
개최국가
대한민국
학회 개최일
2008-08-18 ~ 2008-08-20

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