Characteristics of Cu/C Films on Polymer Substrate by ECR Chemical Vapor Deposition

제목
Characteristics of Cu/C Films on Polymer Substrate by ECR Chemical Vapor Deposition
저자
BYUN, Dong Jin
학회명
9th APCChE Congress and CHEMECA 2002
개최지
9th APCChE Congress and CHEMECA 2002
학회 개최일
2002-09-29