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Characteristics of Cu/C Films on Polymer Substrate by ECR Chemical Vapor Deposition
- 제목
- Characteristics of Cu/C Films on Polymer Substrate by ECR Chemical Vapor Deposition
- 저자
- BYUN, Dong Jin
- 학회명
- 9th APCChE Congress and CHEMECA 2002
- 개최지
- 9th APCChE Congress and CHEMECA 2002
- 학회 개최일
- 2002-09-29