Properties of thin oxide film grown by rapid thermal oxidation on GaN

제목
Properties of thin oxide film grown by rapid thermal oxidation on GaN
저자
BYUN, Dong Jin
학회명
International Symposium on the Physics of Semiconductors and Applications-2002(Abstracts of The 11th Seoul)
개최지
Cheju, Korea
학회 개최일
2002-08-22 ~ 2002-08-23