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Deposition of Iridium Oxide Thin Films as Bottom Electrodes of Ferroelectric Capacitors

  • CHOI, In-Hoon
제목
Deposition of Iridium Oxide Thin Films as Bottom Electrodes of Ferroelectric Capacitors
저자
CHOI, In-Hoon
발행일
2003-11-01
학회명
MRS Korea

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