Synthesis of novel platinum precursor and its application to metal organic chemical vapor deposition of platinum thin films

초록

A novel platinum aminoalkoxide complex, Pt(dmamp)(2) has been prepared by the reaction of cis-(py)(2)PtI2 with two equivalents of Na(dmamp) (dmamp = 1-dimethylamino-2-methyl-2-propanolate). Single-crystal X-ray crystallographic analysis shows that the Pt(dmamp)(2) complex keeps a square planar geometry with each two nitrogen atoms and two oxygen atoms having trans configuration. Platinum films have been deposited on TaN/Ta/Si substrates by metal organic chemical vapor deposition (MOCVD) using Pt(dmamp)(2). As-deposited platinum thin films did not contain any appreciable amounts of impurities except a little carbon. As the deposition temperature was increased, the films resistivity and deposition rate increased. The electrical resistivity (13.6 mu Omega cm) of Pt film deposited at 400 degrees C is a little higher than the bulk value (10.5 mu Omega cm) at 293 K. The chemical composition, crystalline structure, and morphology of the deposited films were investigated by X-ray photoelectron spectroscopy, X-ray diffraction, and atomic force microscopy.

키워드