A properties of Pt/Cr layers due to Fabrication Conditions and micro hot plate thermal characteristic

  • Yung-Kwon Sung
제목
A properties of Pt/Cr layers due to Fabrication Conditions and micro hot plate thermal characteristic
저자
Yung-Kwon Sung
학회명
IEEE CAS'96
개최지
IEEE CAS'96
학회 개최일
1996-10-10