The Air Void tunnel formation incorporating sacrificial layer on Patterned Sapphire Substrate for a Chemical Lift-Off Process

The Air Void tunnel formation incorporating sacrificial layer on Patterned Sapphire Substrate for a Chemical Lift-Off Process
제목
The Air Void tunnel formation incorporating sacrificial layer on Patterned Sapphire Substrate for a Chemical Lift-Off Process
제목 (타언어)
The Air Void tunnel formation incorporating sacrificial layer on Patterned Sapphire Substrate for a Chemical Lift-Off Process
저자
BYUN, Dong Jin
발행일
2018-08-21
학회명
IUMRS-ICEM 2018
개최국가
대한민국
학회 개최일
2018-08-19 ~ 2018-08-24