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A novel UV-LIGA process using PMER as a mold material for optical switch application

  • Pak, James Jungho
제목
A novel UV-LIGA process using PMER as a mold material for optical switch application
저자
Pak, James Jungho
학회명
11th International Conference on Solid-State Sensors and Actuators (Transducers'01)
개최국가
독일
학회 개최일
2001-06-01 ~ 2001-06-01

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