Characteristics of Ta2O5 and (1-x)Ta2O5-xTiO2 thin film at various annealing temperature by CVD

제목
Characteristics of Ta2O5 and (1-x)Ta2O5-xTiO2 thin film at various annealing temperature by CVD
저자
BYUN, Dong Jin
학회명
Abstracts of The 12th Seoul, International Symposium on the Physics of Semiconductors and Applications(ISPSA-2004)
학회 개최일
2004-01-01 ~ 2004-01-02