High sensitivity Capacitive Humidity Sensor with a Novel Polyimide Design Fabricated by MEMS Technology

  • Moon Byung-Moo
제목
High sensitivity Capacitive Humidity Sensor with a Novel Polyimide Design Fabricated by MEMS Technology
저자
Moon Byung-Moo
학회명
4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
개최국가
중국
학회 개최일
2009-01-05 ~ 2009-01-08