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- 제목
- High sensitivity Capacitive Humidity Sensor with a Novel Polyimide Design Fabricated by MEMS Technology
- 저자
- Moon Byung-Moo
- 학회명
- 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
- 개최국가
- 중국
- 학회 개최일
- 2009-01-05 ~ 2009-01-08