Optimization of Nanowire Design According to Trap Quality of Spacer Dielectric for Performance of GAA Nanowires FET

Optimization of Nanowire Design According to Trap Quality of Spacer Dielectric for Performance of GAA Nanowires FET
제목
Optimization of Nanowire Design According to Trap Quality of Spacer Dielectric for Performance of GAA Nanowires FET
제목 (타언어)
Optimization of Nanowire Design According to Trap Quality of Spacer Dielectric for Performance of GAA Nanowires FET
저자
LEE Jae Woo
발행일
2018-02-06
학회명
제25회 한국 반도체 학술대회
개최지
강원도 하이원 리조트/호텔
개최국가
대한민국
학회 개최일
2018-02-05 ~ 2018-02-07