Enhanced Performance and SRAM Stability in FinFET with Reduced Process Steps for Source/Drain Doping

제목
Enhanced Performance and SRAM Stability in FinFET with Reduced Process Steps for Source/Drain Doping
저자
Ji-Woon Yang
학회명
IEEE International Symposium on VLSI Technology, System, and Applications
개최국가
대만
학회 개최일
2008-04-21 ~ 2008-04-23