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Effect of plasma treatment in Cu CVD thin film growth using the Cu(dmamb)2
Effect of plasma treatment in Cu CVD thin film growth using the Cu(dmamb)2
- 제목
- Effect of plasma treatment in Cu CVD thin film growth using the Cu(dmamb)2
- 제목 (타언어)
- Effect of plasma treatment in Cu CVD thin film growth using the Cu(dmamb)2
- 저자
- BYUN, Dong Jin
- 발행일
- 2010-08-24
- 학회명
- International Conference on Electronic Materials 2010 presented by International Union of Material Research Societies
- 개최국가
- 대한민국
- 학회 개최일
- 2010-08-22 ~ 2010-08-27