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Charateristics of Carbon Incorperated BN Films Deposited by Radio-Frequency PACVD

  • CHOI, In-Hoon
제목
Charateristics of Carbon Incorperated BN Films Deposited by Radio-Frequency PACVD
저자
CHOI, In-Hoon
학회명
The International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2000)
개최지
The International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2000)
학회 개최일
2000-01-01

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